离子束溅射镀膜是一种高能沉积技术，具有传统热蒸发镀膜无可比拟的优点，制备的膜层结构致密、超低吸收与散射损耗及优异的环镜稳定性等特点，目前，离子束溅射镀膜技术是制备高性能优质光学薄膜的优选方案，尤其在高能激光、激光陀螺、空间光学等精密光学领域。 Ion Beam Sputtering (IBS) is a premier deposition technology for optical coatings. IBS films exhibit extremely low absorption and scatter when compared with films deposited by other means. The high energy of the condensing material produces bulk-like, amorphous layers with minimal micro-structure and negligible vacuum-to-air shift. As a highly deterministic and consistent process, IBS is capable of accurately and routinely depositing complicated, multifunctional filmstructures. The low operating temperature of the IBS process is compatible with temperature-sensitive substrates, such as gratings, electro-optical mechanical components, and deformable mirrors.
CHARACTERISTICS
Precise control of film properties
Exceptional stoichiometry
Smooth film boundaries
Low process temperature
Fully dense, robust films
BENEFITS
Predictable and repeatable optical performance
Ultra-low absorption
Ultra-low scatter
Successful coating of temperature sensitive optics
Negligible VAC-AIR shift
Laser damage resistance
Mechanical durability
Environmental stability
Space qualified
APPLICATIONS
Lasers & laser systems
Medical devices
Aerospace & Defense
Industrial & Scientific Research
High-fluence optics
Non-linear crystals
Chemical Barrier Coating
Space qualified optics
Femtosecond Lasers
